Thin Film Deposition Techniques and Nanofabrication: A Comparative Analysis vis-à-vis Recent Advances
DOI:
https://doi.org/10.66000/Keywords:
Thin films, deposition techniques, nanofabrication, semiconductor devices, 2D materialsAbstract
Present manuscript is a comprehensive analytical review of prevailing techniques used for thin film deposition in materials science. To keep this review abreast with latest advancement in the discussed field, about 60% of the referred literature belongs to last 5 years and about 85% of the referred literature belongs to last 10 years. The detailed comparative analysis of physical vapour deposition, chemical vapour deposition, atomic layer deposition, sputtering method and liquid-liquid-interface transfer methods is provided, focusing on their key parameters, advantages, and limitations. The applications of these techniques in semiconductor technology, photodetectors, emerging two-dimensional materials and heterostructures, and solar cells are also discussed. Furthermore, the role of machine learning in optimizing thin-film deposition processes is highlighted, and potential future research directions are outlined to address existing challenges and gaps in the field.
References
[1] Šmit Ž, IsteničJ, Knific T. Plating of archaeological metallic objects – studies by differential PIXE. Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms. 2008 Apr 17;266(10):2329–33.
[2] Fajfar H, Rupnik Z, Šmit Ž. Analysis of metals with luster: Roman brass and silver. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 2015 Nov 1;362:194–201.
[3] Oke JA, Jen TC. Atomic layer deposition and other thin film deposition techniques: From principles to film properties. Journal of Materials Research and Technology. 2022 Oct;21. https://doi.org/10.1016/j.jmrt.2022.10.064
[4] Baek S, Kim S, Han SA, Kim YH, Kim S, Kim JH. Synthesis Strategies and Nanoarchitectonics for High‐Performance Transition Metal Dichalcogenide Thin Film Field‐effect Transistors. ChemNanoMat. 2023 Jun 5;9(7). https://doi.org/10.1002/cnma.202300104
[5] Mason Jr. RB. Thin Film Deposition Techniques—An Overview. Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering. ASM International, 2023 Jan 31;1–11.
https://doi.org/10.31399/asm.tb.itfdtktmse.t56060001
[6] Toma FTZ, Rahman MdS, Hussain KMdA, Ahmed S. Thin Film Deposition Techniques: A Comprehensive Review. Journal of Modern Nanotechnology [Internet]. 2024 Nov 21 [cited 2025 Feb 20];4:6. https://doi.org/10.53964/jmn.2024006 Available from: https://image.innovationforever.com/file/20241121/cfb8f3e041a34bb298e01d3c3665582f/JMN20240268.pdf
[7] Chavalekvirat P, Hirunpinyopas W, Deshsorn K, Jitapunkul K, Iamprasertkun P. Liquid Phase Exfoliation of 2D Materials and Its Electrochemical Applications in the Data-Driven Future. Precision Chemistry. 2024 Mar 29;2(7):300–29. doi: 10.1021/prechem.3c00119
[8] Farajian AA, Mortezaee R, Osborn TH, Pupysheva OV, Wang M, Zhamu A, et al. Multiscale molecular thermodynamics of graphene-oxide liquid-phase exfoliation. Physical Chemistry Chemical Physics. 2019;21(4):1761–72. doi: 10.1039/C8CP07115B.
[9] Milošević IR, Tomašević T, Vujin J, Panajotović R, Pešić J, Tomašević-Ilić T. Efficient Production of Two-Dimensional Pyrophyllite Through Liquid-Phase Exfoliation. Physical Chemistry 2024 : proceedings Vol 1. 2024;361–4. doi: 10.46793/phys.chem24i.361m.
[10] Jamshed A, Basit M, Ali S, Hakeem S, Liaqat MA, Jamshed F, et al. Fabrication of 2-D Nanosheets of NbSe2 via Liquid Phase Exfoliation and Their Morphological, Structural, and Optical Characterization. CEMP 2023. 2024 Apr 24;27. doi: 10.3390/materproc2024017027.
[11] Chauhan M, Prakash R, Singh AK. Role of liquid substrates in the self-assembly and charge transport of 2D organic semiconductors. Journal of Materials Chemistry C. 2025;13(37):19425–36. https://doi.org/10.1039/D5TC02069G
[12] Heikkinen M, Ghiyasi R, Karppinen M. Layer‐Engineered Functional Multilayer Thin‐Film Structures and Interfaces through Atomic and Molecular Layer Deposition. Advanced Materials Interfaces. 2024 Jun 28;12(4). https://doi.org/10.1002/admi.202400262
[13] Ashurbekova K, Knez M. Atomic Layer Processing (ALP): Ubi es et Quo Vadis? Advanced Materials Interfaces. 2024 Oct 25; 11(22) https://doi.org/10.1002/admi.202400408
[14] Kaloyeros AE, Arkles B. Review—Silicon Carbide Thin Film Technologies: Recent Advances in Processing, Properties, and Applications: Part II. PVD and Alternative (Non-PVD and Non-CVD) Deposition Techniques. ECS Journal of Solid State Science and Technology. 2024 Apr 1;13(4):043001. https://doi.org/10.1149/2162-8777/ad3672
[15] Atmane S, Maroussiak A, Caillard A, Thomann AL, Kateb M, Gudmundsson JT, et al. Role of sputtered atom and ion energy distribution in films deposited by physical vapor deposition: A molecular dynamics approach. Journal of Vacuum Science & Technology A [Internet]. 2024 Nov 18;42(060401):1–7. Available from: https://pubs.aip.org/avs/jva/article/42/6/060401/3320969/Role-of-sputtered-atom-and-ion-energy-distribution https://doi.org/10.1116/6.0004134
[16] Srivastava N, Srivastava M, Mishra P K, Gupta V K (Eds.). (2020). Green synthesis of nanomaterials for bioenergy applications. John Wiley & Sons. Print ISBN:9781119576815 Online ISBN:9781119576785 DOI:10.1002/9781119576785
[17] Patidar J, Pshyk O, Sommerhäuser L, Siol S. Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS [Internet]. 2024 [cited 2026 Feb 21]. Available from: https://arxiv.org/abs/2408.12174v1 https://doi.org/10.48550/arxiv.2408.12174
[18] Razia Khan Sharme, Quijada M, Terrones M, Rana M M. Thin Conducting Films: Preparation Methods, Optical and Electrical Properties, and Emerging Trends, Challenges, and Opportunities. Materials [Internet]. 2024 Sep 17;17(18):4559–9. Available from: https://www.mdpi.com/1996-1944/17/18/4559 https://doi.org/10.3390/ma17184559
[19] Praveen B, Madhuri P, Verma RK, Ashok A, Deshmukh SG. Metal Oxide Thin Films: A Comprehensive Study of Synthesis, Characterization and Applications. Thin Film Nanomaterials: Synthesis, Properties and Innovative Energy Applications. 2024 Jul 24;166–98. https://doi.org/10.2174/9789815256086124010010
[20] Pirposhte MA. ZnO Thin Films: Fabrication Routes, and Applications. Materials Research Foundations. 2023 Jun 5;263–93. https://doi.org/10.21741/9781644902394-9
[21] Sun L, Yuan G, Gao L, Yang J, Chhowalla M, Gharahcheshmeh MH, et al. Chemical vapour deposition. Nature Reviews Methods Primers. 2021 Jan 14;1(1). https://doi.org/10.1038/s43586-020-00005-y
[22] Reo Y, Zou T, Choi T, Kim S, Go JY, Roh T, et al. Vapour-deposited high-performance tin perovskite transistors. Nature Electronics. 2025 Apr 28;8(5):403–10. https://doi.org/10.1038/s41928-025-01380-8
[23] Chemical Vapor Deposition of Silicon Carbide and Thin Films | Nature Research Intelligence [Internet]. Nature.com. 2023 [cited 2026 Feb 21]. Available from: https://www.nature.com/research-intelligence/nri-topic-summaries/chemical-vapor-deposition-of-silicon-carbide-and-thin-films-micro-344244
[24] Amir Hossein Mostafavi, Ajay Kumar Mishra, Gallucci F, Jong Hak Kim, Ulbricht M, Anna Maria Coclite, et al. Advances in surface modification and functionalization for tailoring the characteristics of thin films and membranes via chemical vapor deposition techniques. Journal of Applied Polymer Science. 2023 Feb 23;140(15). https://doi.org/10.1002/app.53720
[25] Han T, Taheri Z, Ko H. Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review. 2025 Jul 15 [cited 2026 Feb 21];1–11. Available from: https://doi.org/10.48550/arxiv.2507.10983 https://doi.org/10.48550/arxiv.2507.10983
[26] Zhang Q, Sando D, Nagarajan V (2016). Chemical route derived bismuth ferrite thin films and nanomaterials. Journal of Materials Chemistry C, 4(19), 4092-4124.
[27] Samco, ‘Semiconductor And Materials COmpany, Online resource, https://www.samcointl.com/news-events/tutorials/ald-basics/
[28] Oviroh PO, Akbarzadeh R, Pan D, Coetzee RAM, Jen TC. New development of atomic layer deposition: processes, methods and applications. Science and Technology of Advanced Materials, 2019; 20(1): 465–496. https://doi.org/10.1080/14686996.2019.1599694
[29] Borowski P, Myśliwiec J. Recent Advances in Magnetron Sputtering: From Fundamentals to Industrial Applications. Coatings. 2025 Aug 7;15(8):922. https://doi.org/10.3390/coatings15080922
[30] Garg R, Spandana Gonuguntla, Saddam Sk, Muhammad Saqlain Iqbal, Adewumi Oluwasogo Dada, Pal U, et al. Sputtering thin films: Materials, applications, challenges and future directions. Advances in Colloid and Interface Science [Internet]. 2024 May 22;330:103203–3. Available from: https://www.sciencedirect.com/science/article/ pii/S000186862400126X https://doi.org/10.1016/j.cis.2024.103203
[31] Singh M, Sharma Y, Vasudev H, Singh M. Various sputtered coating deposition techniques for the development of boron nitride based thin film coating: A review. AIP Conference Proceedings [Internet]. 2024 [cited 2026 Feb 21];3007:020008. Available from: https://doi.org/10.1063/5.0192654
[32] Janarthanan B, Thirunavukkarasu C, Maruthamuthu S, Manthrammel M A, Shkir M, AlFaify S, Park C. Basic deposition methods of thin films. Journal of Molecular Structure, (2021) 1241, 130606. doi: 10.1016/j.molstruc.2021.130606
[33] Palmero A, Martin N. Advanced Strategies in Thin Films Engineering by Magnetron Sputtering. Coatings. 2020 Apr 23;10(4):419. https://doi.org/10.3390/coatings10040419
[34] Wang L, Sahabudeen H, Zhang T, Dong R. Liquid-interface-assisted synthesis of covalent-organic and metal-organic two-dimensional crystalline polymers. npj 2D Materials and Applications, (2018). 2(1), 26. https://www.nature.com/articles/s41699-018-0071-5
[35] Wang Z, Guo H, Li J, Wang L, Dong G. Marangoni Effect-Controlled Growth of Oriented Film for High Performance C8-BTBT Transistors. Adv. Mat. Interfaces (2019), 1801736. doi:10.1002/admi.201801736
[36] Zhengran H, Zhang Z, Yeboahc KA,Sheng B. Binary solvent engineering for small-molecular organic semiconductor crystallization. Mater Adv. (2023), 4, 769
[37] Kang MJ, Doi I, Mori H, Miyazaki E, Takimiya K, Ikeda M, Kuwabara H. Alkylated Dinaphtho[2,3-b:2′,3′-f]Thieno[3,2-b] Thiophenes (Cn-DNTTs): Organic Semiconductors for High-Performance Thin-Film Transistors. Adv Mater. 2011; 23: 1222–1225 doi:10.1002/adma.201001283
[38] Ebata H, Miyazaki E, Yamamoto T, Takimiya K. Synthesis, properties, and structures of benzo[1,2-b:4,5-b']bis[b] benzo- thiophene and benzo[1,2-b:4,5-b']bis[b] benzoselenophene. Org Lett. 2007; 9: 4499-4502. https://doi.org/10.1021/ol701815j
[39] Tsutsui Y. Unraveling Unprecedented Charge Carrier Mobility through Structure Property Relationship of Four Isomers of Didodecyl[1]benzothieno[3,2-b][1]benzothiophene Adv Mater. 2016; 28: 7106–7114. https://doi.org/10.1002/adma.201601285
[40] Xi J,Long M,Tang L,Wang D,Shuai Z. First-principles prediction of charge mobility in carbon and organic nanomaterials. Nanoscale 2012; 4: 4348.
[41] Keum C-M, Liu S, Al-Shadeedi A, Kaphle V, Callens MK, Han L, Neyts K, Zhao H, Gather MC, Bunge S.D, Twieg RJ, Jakli A, Lüssem B. Tuning charge carrier transport and optical birefringence in liquid-crystalline thin films: A new design space for organic light-emitting diodes. Sci Rep. 2018; 8: 699.
[42] Duan S, Gao X, Wang Y, Yang F, Chen M, Zhang X, Ren X, Hu W. Scalable Fabrication of Highly Crystalline Organic Semiconductor Thin Film by Channel-Restricted Screen Printing toward the Low-Cost Fabrication of High-Performance Transistor Arrays. Adv Mater. 2019; 31: 1807975.
[43] He D, Qiao J, Zhang L, Wang J, Lan T, Qian J, Li Y, Shi Y, Chai Y, Lan W, Ono LK, Qi Y, Xu J-B, Ji W, Wang X. Ultrahigh mobility and efficient charge injection in monolayer organic thin-film transistors on boron nitride. Sci Adv. 2017; 3: e1701186.
[44] Yuan Y, Giri G, Ayzner AL, Zoombelt AP, Mannsfeld SCB, et al. Ultra-high mobility transparent organic thin film transistors grown by an off-centre spin-coating method. Nat Commun. 2014; 5: 3005.
[45] Kim S.J, Choi K, Lee B, Kim Y, Hong BH. Materials for Flexible, Stretchable Electronics: Graphene and 2D Materials. Annu Rev Mater Res. 2015; 45: 63–84.
[46] Tatar G, Bayarand S, Cicek, in 2022 International Conference on Innovations in Intelligent Systems and Applications (INISTA), IEEE, Biarritz, France, 2022, pp. 1–6.
[47] Zhang J, Wang F, Shenoy VB, Tang M, Lou J. Mater Today, 2020; 40: 132–139.
[48] Coleman JN, et al. Two-Dimensional Nanosheets Produced by Liquid Exfoliation of Layered Materials. Science, 2011; 331: 568–571.
[49] Smith RJ, et al. Large-scale exfoliation of inorganic layered compounds in aqueous surfactant solutions Adv Mater. 2011; 23: 3944–3948.
[50] Lin Z, et al. Solution-processable 2D semiconductors for high-performance large-area electronics. Nature, 2018; 562: 254–258.
[51] Gomes FOV, et al. High mobility solution processed MoS2 thin film transistors. Solid-State Electron. 2019; 158: 75–84.
[52] Nandihalli N, Gregory DH, Mori T. Energy-Saving Pathways for Thermoelectric Nanomaterial Synthesis: Hydrothermal/Solvothermal, Microwave-Assisted, Solution-Based, and Powder Processing. Adv Mat. 2022; 9: 25, 2106052 https://doi.org/10.1002/advs.202106052
[53] Schalk N, Tkadletz M, Mitterer C. Hard coatings for cutting applications: Physical vs. chemical vapor deposition and future challenges for the coatings community. Surface & Coatings Technol. 2021; 429: 127949–9. https://doi.org/10.1016/j.surfcoat.2021.127949
[54] Duta L, Mihailescu I N. Advances and Challenges in Pulsed Laser Deposition for Complex Material Applications. Coatings. 2023;13(2): 393. https://doi.org/10.3390/coatings13020393
[55] Loch MT. (2018) PhD dissertation available at https://mediatum.ub.tum.de/doc/1446966/249486.pdf
[56] Holder E, Tesla N, Rogach AL. Hybrid nanocomposite materials with organic and inorganic components for opto-electronic devices. J Mater Chem. 2008; 18: 1064-1078 available at https://pubs.rsc.org/en/content/articlelanding/2008/jm/b712176h
[57] Khan J, Ahmad RTM, Tan J, Zhang R, Khan U, Liu B. Recent advances in 2D organic−inorganic heterostructures for electronics and optoelectronics. SmartMat, April 2023; 4(2): e1156 available at https://onlinelibrary.wiley.com/doi/full/10.1002/smm2.1156
[58] Bellani S, Bartolotta A, Agresti A, Calogero G, Gransini G, Carlo AD, Kymakis E, Bonaccorso F. Solution-processed two-dimensional materials for next-generation photovoltaics. Chem Soc Rev. 2021; 50: 11870-11965 available at https://pubs.rsc.org/en/content/articlehtml/2021/cs/d1cs00106j
[59] Wang J, Zhang C, et al. Spin-optoelectronic devices based on hybrid organic-inorganic trihalide perovskites. Nat Commun 2019; 10: 129. available at https://doi.org/10.1038/s41467-018-07952-x
[60] Singh AK, Andleeb S, Singh AK. Tuning of electrical properties of CVD grown graphene by surface doping with organic molecules. AIP Advances. 2023;13: (095012).
[61] Chauhan M, Singh AK, Chaudhary V, Pandey RK, Singh AK. Gigantic enhancement of optoelectrical properties in polythiophene thin films via MoS2 nanosheet-induced aggregation and ordering. Materials Advances. 2025; 6(5): 1822–30.
[62] Wen H, Zhao E, Zhang Q, Xiang R, Yu W. Machine-learning-driven prediction of thin film parameters for optimizing the dielectric deposition in semiconductor fabrication. Integration. 2026; 107: 102617. https://doi.org/10.1016/j.vlsi.2025.102617
[63] Randhawa K. Application of Artificial Intelligence in Predicting and Optimizing Material Properties. Engineering Research Express. 2026. DOI 10.1088/2631-8695/ae3bac
[64] Yu HM, Hsiao HY, Hsieh MH, Yang A, Chang YC, Luoh T, et al. AI-Driven Optimization of Thin Film and CMP Processes in 3D NAND Manufacturing. IEEE Transactions on Semiconductor Manufacturing. 2026; 1–1. doi: 10.1109/TSM.2026.3659914
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